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Thermo Scientific™ SURF-CAL™ Particle Size Standards
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Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.
- Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
- By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
- You can also assess the performance of your SSIS at critical stages in the manufacturing process.
- All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 × 108 particles per mL.
Note:
Products PD1100 and smaller are also available at 1010 particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.

Specifications
Specifications
Additive | None |
Concentration | 1 x 10¹° particles/mL |
Content And Storage | Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer. |
Contents | Polystyrene microspheres in deionized, filtered water |
Description | Particles For calibration and maintenance of Scanning Surface Inspection Systems (SSIS). |
Color | White or Colorless |
For Use With (Application) | SSIS Calibration and Maintenance |
Material | Polystyrene |
Product Type | Size Standard Particles |
Includes | Certificate of Calibration and Traceability to NIST |
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Certificates
Certificates
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